Einladung zum Vortrag im Kolloquium Technische Kybernetik

Multiscale Systems Theory with Microelectronics Applications

Prof. Richard Braatz

Department of Chemical and Biomolecular Engineering
University of Illinois at Urbana-Champaign
Urbana, USA

    Zeit: Freitag · 9. 12. 2005 · 14:00 Uhr
    Ort: Seminarraum 3.241 · Pfaffenwaldring 9 · Campus Stuttgart-Vaihingen

Abstract

New applications in materials, medicine, and computers are being discovered where the control of events at the molecular and nanoscopic scales is critical to product quality, although the primary manipulation of these events during processing occurs at macroscopic length scales. This drives our research program in the creation of tools for the design and control of multiscale systems that have length scales ranging from the atomistic to the macroscopic. The challenges to building such tools include uncertainties in the physicochemical mechanisms as well as the values of thermodynamic and kinetic parameters, complexities in the simulation of model equations that can span the subatomic to the macroscopic scales, lack of direct real-time manipulations and measurements of most properties at the nanoscale during processing, and the inapplicability of most existing mathematical systems tools to address systems described by stochastic simulation models. These challenges are being addressed by an approach to multiscale systems engineering that includes stochastic parameter sensitivity analysis, Bayesian parameter estimation applied to ab initio calculations and experimental data, hypothesis mechanism selection, and multistep optimization. This enables multiscale systems to be designed based on the simulation codes that are most appropriate for simulating the various time and length scales of the process. The main points are illustrated by applications to the formation of transistor junctions in advanced CMOS devices (in collaboration with Prof. E. Seebauer) and the manufacture of copper interconnects in electronic devices (in collaboration with Prof. R. Alkire). For ultrashallow junctions, the results provide specific recommendations for microelectronics tool manufacturers on how to optimize processes to produce shallower junctions. For copper interconnects, systems principles are used to gain fundamental insights into surface reaction mechanisms, and to move towards the rational design of new chemistries.

Biographical Information

Richard Braatz is Professor and University Scholar at the University of Illinois at Urbana-Champaign, where he holds joint positions in the College of Engineering and the College of Liberal Arts and Sciences. Before starting at U of I he received M.S. & Ph.D. degrees from Caltech and spent a year at DuPont. Dr. Braatz is a co-author of 90+ journal papers and 3 books, and has consulted and/or collaborated with more than 10 companies including Merck, IBM, and UTC Fuel Cells. Honors and awards include the AACC Donald P. Eckman Award (2000), the ASEE Curtis W. McGraw Research Award (2004), and the AIChE CAST Outstanding Young Researcher Award (2005). Dr. Braatz's main research interests are in complex and multiscale systems, with applications including the manufacture of copper interconnects and the formation of ultrashallow transistor junctions in advanced CMOS devices